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Surface Element Analysis Device Product List

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[Analysis Case] Evaluation of the Surface Silanol Groups

[Analysis Case] Evaluation of the Surface Silanol Groups

Quantitative evaluation of silanol groups is possible with TOF-SIMS.

The presence of silanol groups (Si-OH) on the surfaces of glass and wafers affects properties such as hydrophobicity and hydrophilicity. Therefore, it is likely to influence subsequent surface treatments, necessitating control. We will introduce a case where the quantification of silanol groups was performed using TOF-SIMS. To conduct the evaluation, calibration curves were created using several types of samples with different concentrations. In the measurement examples, the silanol groups on the surfaces of samples with different materials and conditions were compared. Measurement method: TOF-SIMS Product fields: LSI, memory, electronic components Analysis purpose: Composition evaluation and identification For more details, please download the materials or contact us.

  • Contract Analysis
  • Surface Element Analysis Device

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[Analysis Case] Evaluation of Organic EL Device Degradation

[Analysis Case] Evaluation of Organic EL Device Degradation

Suppressing changes due to processing through cutting under atmosphere control.

A comparison was made between commercially available digital audio players equipped with organic EL, one that had undergone electrical power and experienced brightness degradation and one that had not. As a result, no differences were observed in the TOF-SIMS spectra between the samples.

  • Contract Analysis
  • Surface Element Analysis Device

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[Analysis Case] Wide-area Quantitative Mapping using XPS

[Analysis Case] Wide-area Quantitative Mapping using XPS

It is possible to evaluate the composition distribution in an area of up to 70×70mm.

This is an example of wide-area quantitative mapping using XPS. We evaluated organic residue on silicon wafers using the following procedure. To graph the amount (atomic concentration) rather than peak intensity, it is less affected by sample roughness and allows for data acquisition over a wide area. It is suitable for investigating organic and inorganic contamination, discoloration, surface treatments, etc., as it enables an overview assessment of the compositional distribution on the sample surface.

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  • Contract Analysis
  • Contract measurement
  • Surface Element Analysis Device

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